Simulating and emulating semiconductor fabrication processes

Core repository for shared functionalities across the ViennaTools libraries.

Emulation models for the DRIE Sequences DEM, DREM, and DREAM.

High-performance sparse level-set library for topography simulations

Ray-tracing library for topography simulation applications

Development repository for ViennaCS, a volumetric cell-set representation on top of level-set functionalities for surfaces.

Developement repository for ViennaHRLE, a high performance hierarchical run-length encoded data structure.

Example of how to use ViennaLS as a dependency in a project.

🐳 Docker Image used for the CI

Ensemble Monte Carlo code for semiconductors and metals